Femtosecond laser internal manufacturing of three-dimensional microstructure devices

Abstract

Potential applications for three-dimensional microstructure devices developed rapidly across numerous fields including microoptics, microfluidics, microelectromechanical systems, and biomedical devices. Benefiting from many unique fabricating advantages, internal manufacturing methods have become the dominant process for three-dimensional microstructure device manufacturing. This paper provides a brief review of the most common techniques of femtosecond laser three-dimensional internal manufacturing (3DIM). The physical mechanisms and representative experimental results of 3D manufacturing technologies based on multiphoton polymerization, laser modification, microexplosion and continuous hollow structure internal manufacturing are provided in details. The important progress in emerging applications based on the 3DIM technologies is introduced as well.